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substrate resistivity中文是什么意思

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  • The loss of coplanar wave - guides ( cpws ) on ps / ops layers with thickness about 10 , and 70um respectively on low - resisitivity ( o . olflcm ) si has been studied , which are expected to increase the substrate resistivity and then to reduce its effective dielectric loss under the microwave operation
    01只cn : ) _ l生長的多孔硅/氧化多孔硅厚膜為襯底制備的共平面波導(dǎo)( cpw )的微波插入損耗特性,其介質(zhì)膜的厚度分別是10腳和70腳。
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